Effects of pressure and gas type on the response of integrated thermal flow sensors in low flow regime

Conference Paper
Publication Date:
2005
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/67768
Book title:
Proceedings of the 19th European Conference on Solid-State Transducers (Eurosensors XIX)