Real time study of the interaction of silicon (001) with atomic hydrogen: the amorphization-etching kinetic model

Conference Poster

Publication Date:

2007

Iris type:

04.03 Poster in Atti di convegno

List of contributors:

Capezzuto, Pio; Bianco, GIUSEPPE VALERIO; Losurdo, Maria; Bruno, Giovanni; Giangregorio, MARIA MICHELA

Authors of the University:

BIANCO GIUSEPPE VALERIO

GIANGREGORIO MARIA MICHELA

Handle:

https://iris.cnr.it/handle/20.500.14243/88448