Synthesis and characterization of novel diaminodimethylsilane derivatives as potential CVD precursors for zirconium or zirconium/silicon nitrides

Conference Paper

Publication Date:

2003

Iris type:

04.01 Contributo in Atti di convegno

List of contributors:

Carta, Giovanni; Benetollo, Franco; Rossetto, GILBERTO LUCIO; Zanella, Pierino

Handle:

https://iris.cnr.it/handle/20.500.14243/431230