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Rapid CVD growth of millimetre-sized single crystal graphene using a cold-wall reactor

Academic Article
Publication Date:
2015
abstract:
In this work we present a simple pathway to obtain large single-crystal graphene on copper (Cu) foils with high growth rates using a commercially available cold-wall chemical vapour deposition (CVD) reactor.Weshow that graphene nucleation density is drastically reduced and crystal growth is accelerated when: (i) using ex situ oxidized foils; (ii) performing annealing in an inert atmosphere prior to growth; (iii) enclosing the foils to lower the precursor impingement flux during growth. Growth rates as high as 14.7 and 17.5 ?mmin-1 are obtained on flat and folded foils, respectively. Thus, singlecrystal grains with lateral size of about 1mmcan be obtained in just 1 h. The samples are characterized by optical microscopy, scanning electron microscopy, x-ray photoelectron spectroscopy, Raman spectroscopy as well as selected area electron diffraction and low-energy electron diffraction, which confirm the high quality and homogeneity of the films. The development of a process for the quick production of large grain graphene in a commonly used commercial CVDreactor is a significant step towards an increased accessibility to millimetre-sized graphene crystals.
Iris type:
01.01 Articolo in rivista
Keywords:
graphene; chemical vapour deposition; single crystal
List of contributors:
Bisio, Francesco; Heun, Stefan
Authors of the University:
BISIO FRANCESCO
HEUN STEFAN
Handle:
https://iris.cnr.it/handle/20.500.14243/282186
Published in:
2D MATERIALS
Journal
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URL

https://iopscience.iop.org/article/10.1088/2053-1583/2/1/014006/pdf
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