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Oxygen-Inhibition Lithography for the Fabrication of Multipolymeric Structures

Academic Article
Publication Date:
2015
abstract:
Oxygen inhibition lithography (OIL), an innovative photolithographic technology for the fabrication of multiscale and multipolymeric patterns and devices, is presented by A. Vitale, M. Quaglio, and co-workers on page 4560. Simultaneous control over pattern shape, dimensions, and composition is achieved exploiting the inhibitory effects of oxygen during UV curing in air. Multifunctional structures can be easily fabricated, precisely and concurrently tuning the surface topography and pattern functionality.
Iris type:
01.01 Articolo in rivista
Keywords:
lithography; oxygen inhibition; polymers
List of contributors:
Cocuzza, Matteo
Handle:
https://iris.cnr.it/handle/20.500.14243/302241
Published in:
ADVANCED MATERIALS
Journal
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URL

https://onlinelibrary.wiley.com/doi/full/10.1002/adma.201501737
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