INSITU SUPERCONDUCTING Y-BA-CU-O THIN-FILMS BY SINGLE-TARGET RF MAGNETRON SPUTTERING

Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.