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Amorphous Silicon Nitride: a suitable alloy for optical multilayered structures

Academic Article
Publication Date:
2006
abstract:
a-Si1-xNx:H thin films grown by PECVD in a wide compositional range were characterized by spectroscopic ellipsometry and Mach-Zehnder interferometry. Taking advantage from their optical properties, the alloys were fruitfully applied for stratified structures such as distributed Bragg reflectors, conventional and double resonance optical microcavities. (c) 2006 Elsevier B.V. All rights reserved.
Iris type:
01.01 Articolo in rivista
Keywords:
2ND-HARMONIC GENERATION; MICROCAVITIES
List of contributors:
Maddalena, Pasqualino; Galli, Matteo; Lettieri, Stefano
Authors of the University:
LETTIERI STEFANO
Handle:
https://iris.cnr.it/handle/20.500.14243/158741
Published in:
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
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