Recent Improvements on a-SiC:H Films Deposited by UHV-PECVD

Conference Paper
Publication Date:
1994
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/192415
Book title:
XIIth E.C. Photovoltaic Solar Energy Conference: proceedings of the international conference, held at Amsterdam, The Netherland, 11-15 April 1994