Category II and category III defects in 200 KeV Fe implanted InP

Category II and category III defects left after annealing, i. e. end-of-range extrinsic dislocation loops and intrinsic stacking fault tetrahedra due to solid-phase epitaxial regrowth, are studied in 200 KeV Fe implanted InP. By increasing the annealing time loop coarsening occurs, very likely starting from an initial distribution of very small loops, whereas the density of category III defects decreases.