A new family of heavy transition metal coordination compounds and its application, I. Design, synthesis and characterization of volatile organohafnium precursors

The first three representatives of a new family of volatile organohafnium compounds suitable as metallo-organic chemical vapour deposition precursors were synthesized. A combination of cyclopentadienyl- and alkoxo-ligands with a bicyclo[2.2.1]heptane framework was used. Volatility at relatively low temperatures for hafnium compounds was found and the precursors were characterized by elemental analysis and spectroscopic methods (IR, H-1 and C-13 NMR, mass spectrometry and mass-analysed ion kinetic energy spectroscopy). The outlook for use in hafnium functional materials synthesis was derived from the fragmentation data.