Label free detection of specific RNA sequences by a DNA-based CMOS bioMEMS

In this work a resonant mass sensor based on a CMOS-compatible MEMS bulk technology, targeted at the label-free, selective detection of biomolecules, is presented. Both the MEMS fabrication phase and the bioactivation protocol were designed to ensure functionality of on-chip test electronic circuitry. Specifically, the bioactivation steps were performed with single drops of the reagents on the active part of the chip to minimize impact on the electronics and package. The CMOS compatibility of the final device is demonstrated by simultaneous operation of the MEMS resonator and the test electronics.