Lateral dopant profiles in polycrystalline Si delineated by scanning capacitance and transmission electron microscopy
Conference Paper
Publication Date:
2001
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Raineri, Vito; Giannazzo, Filippo; Spinella, ROSARIO CORRADO
Book title:
PROCEEDINGS OF THE 5TH MULTINATIONAL CONGRESS ON ELECTRON MICROSCOPY