EBIC study of internal vs external and B-activated gettering in Epi Silicon on Cz substrates

Abstract
Publication Date:
2003
Iris type:
04.02 Abstract in Atti di convegno
Keywords:
gettering; Si; EBIC
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/95397
Book title:
abstract book