Cost-effective plane-grating monochromator design for extreme-ultraviolet application

The optical design of a plane-grating monochromator mainly intended for high resolution in the extreme ultraviolet and soft x-ray is presented. The configuration has three optical elements. It uses a uniform line-spaced plane grating illuminated in the converging light coming from a focusing concave mirror and an additional plane mirror that is needed to change the grating subtended angle to keep the system in focus on a fixed slit. The parameters of the focusing mirror are determined to introduce a coma that compensates for the coma given by the grating. A monochromator for the 12-50 eV region is designed for application to high-order laser harmonics.