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An optical study of the correlation between growth kinetics and microstructure of Ýc-Si grown by SiH4-H2PECVD
Conference Paper
Publication Date:
2005
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Capezzuto, Pio; Losurdo, Maria; Bruno, Giovanni; Sacchetti, Alberto
Authors of the University:
SACCHETTI ALBERTO
Handle:
https://iris.cnr.it/handle/20.500.14243/53818