Study of Morphology, Electrical Activation and Contact formation of Ion Implanted 4H-SiC

Academic Article

Publication Date:

2010

Iris type:

01.01 Articolo in rivista

List of contributors:

Weng, MING HUNG; Raineri, Vito; Bongiorno, Corrado; Roccaforte, Fabrizio; Giannazzo, Filippo; DI FRANCO, Salvatore

Authors of the University:

BONGIORNO CORRADO

DI FRANCO SALVATORE

GIANNAZZO FILIPPO

ROCCAFORTE FABRIZIO

Handle:

https://iris.cnr.it/handle/20.500.14243/53675

Published in:

DIFFUSION AND DEFECT DATA, SOLID STATE DATA. PART B, SOLID STATE PHENOMENA

Journal