Nanostructured TiO2 thin films prepared by supersonic beams and their application in a sensor array for the discrimination of VOC

In this paper we present the study on gas sensing properties of TiO2 thin films grown by seeded supersonic beam of cluster oxides. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have been successfully used to prepare nanocrystalline thin films of TiO2. The obtained gas sensor devices, prepared by using different deposition parameters, were suitable for the use in a gas sensor array for electronic nose. Sensors showed a quite good response to ethanol, methanol and propanol. Principal component analysis was used as method for testing the array capability in discrimination and recognition of the volatile compounds.