Realization of a distributed RF MEMS Phase Shifter with a very low number of switches

This letter presents the experimental results obtained for a binary distributed phase shifter based on RF MEMS coplanar shunt switches. A new approach based on the image parameter representation of two-port networks is proposed for the modeling of this structure. Vector Network Analyzer measurements have been performed by recording the scattering parameters of the device, obtaining a differential phase shift of 180° at the frequency f0= 13.7 GHz, very close to the theoretical one ftheo=14 GHz. A very low number of switches has been used for the realization of the component.