Influence of composition of IrO2-Ta2O5 films on secondary ion mass spectra

Conference Paper
Publication Date:
1998
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/219403
Book title:
Synthesis and methodologies in inorganic chemistry: new compounds and materials