Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate
Conference Paper
Publication Date:
2009
abstract:
We present the design and fabrication of a
chemoresistive sensor array for the volatile organic
compounds and gas detection. Different nanofibrous
conductive polymers, produced by electrospinning
technique, have been used as chemical interactive
materials. Sensor array was integrated with read-out
electronic circuits on flexible substrate. In order to obtain
high electrical performances maintaining integration
capability, on plastic materials, respect to standard c-Si
CMOS technology, polycrystalline silicon thin film
transistor based circuitry has been used. The performances
of the fabricated sensor array have been tested with
different concentrations of Methanol, Lactic acid and
Ammonia.
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Mariucci, Luigi; Bearzotti, Andrea
Book title:
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International