The stopping cross-section of aluminum for He ions

The stopping cross-section of Aluminum for He ions has been determined from experimental Rutherford Backscattering (RBS) spectra of bulk and thick film samples by using a Bayesian inference data analysis method. This method allows for the extraction of continuous stopping curves together with a consistent estimate of the errors. The valid energy range of the present parameterization is 0.3-3.0 MeV. The contribution of the plural scattering on the RBS yield at low energy has been measured on thick film samples and it has been observed that a double scattering (DS) calculation is not sufficient to reproduce the low energy background. Nevertheless, the low energy yield of the bulk spectra could be used to reject a class of unphysical simulations, where the calculated low energy yield is significantly larger than the experimental data.