Structural and electrical characterisation of molybdenum-titanium mixed oxides for ethanol sensing deposited by RF sputtering

Molybdenum-titanium (Mo-Ti) mixed oxide thin films were deposited by radio frequency (RF) sputtering and tested as gas sensors before and after oxidation cycles; their electrical responses toward different concentrations of ethanol vapours were measured. Transmission electron microscopy (TEM) was used to investigate the structural and morphological properties of the films and to correlate them to the electrical behaviour of the sensors.