Impact of the purity of silicon on the evolution of ion beam generated defects: From research to technology

Conference Paper
Publication Date:
2000
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/178040
Published in:
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Series