Deposition of Photoluminescent Nanocrystalline Silicon Films by SiF4-SiH4-H2 Plasmas

Abstract
Publication Date:
1996
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/122221
Book title:
Abstracts Fall Meeting of the Material Research Society (MRS)