Publication Date:
2001
abstract:
In this paper, circuital and planar electromagnetic simulations have been performed
to model the microwave response of micromachined lumped elements by using
commercial software packages. The modelling has been performed on realized and
experimentally tested coplanar lumped elements and filters. The technology is
based on micromachining of high resisitivity silicon wafers and GaAs, and the
circuits were obtained on trilayer dielectric membranes and polymide membranes.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Microwaves; Lumped Components
List of contributors:
Bartolucci, Giancarlo; Marcelli, Romolo
Book title:
Proceedings of the 2nd International Conference of the European Society for Precision Engineering and Nanotechnology, Euspen 2001