Hydrogen precipitation in highly oversaturated single-crystalline silicon

Academic Article

Publication Date:

1995

Iris type:

01.01 Articolo in rivista

Keywords:

ION-IMPLANTED SILICON; MOLECULAR-HYDROGEN; SI/SIO2 INTERFACE; DEFECTS; SEMICONDUCTORS

List of contributors:

Authors of the University:

BALBONI ROBERTO

Handle:

Published in:

Journal