Millisecond infrared laser irradiation of SiOxNy: The role of nitrogen in the photoluminescence emission

Conference Paper
Publication Date:
2014
abstract:
[object Object]
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
chemical vapor deposition; laser annealing; photoluminescence; [object Object
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/280087