Characterization of bulk acoustic wave transducers and resonators based on low temperature sputtered AlN thin films

Conference Poster
Publication Date:
2009
Iris type:
04.03 Poster in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/85228
Book title:
IEEE International Ultrasonic Symposium (IUS)