Tunable Microwave SER on Silicon Membrane

This work presents performances of a tunable microwave straight edge resonator (SER) on a silicon membrane. The aim of this approach is to obtain a miniaturised MSW device, integrable in a planar microwave circuit. S11 and S21 parameters of this device are presented for various magnetic polarizing fields showing frequency tunability between approximately 4.2 GHz and 7.25 GHz. Using silicon membranes to support these devices offers important openings toward SER integration in MMIC