Study of the optical crosstalk in a heterodyne displacement gauge with cancelable circuit
Conference Paper
Publication Date:
2017
abstract:
One main focus of high precision heterodyne displacement interferometers are the means of splitting and merging for the reference (R.) and measurement (M) beams when a cancelable circuit is implemented. Optical mixing of R. and M gives birth to a systematc error called cyclic error, which appears as a periodic offset between the detected displacement and the actual one.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
heterodyne; interferometry; phase detection; laser metrology
List of contributors:
Pelizzo, MARIA GUGLIELMINA
Published in: