Design, manufacturing and Characterization of Membrane supported Antennas for 38 GHz Wireless Applications
Conference Paper
Publication Date:
2001
abstract:
New configurations of double slot CPW feed micromachined antenna arrays were realized on a 1.5 ?m thin three-layer dielectric membrane fabricated on Si and GaAs substrates. The antennas were designed for 38 GHz operating frequency
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Micromachining; Antennas; Millimeter Waves
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the 2001 International Semiconductor Conference, IEEE CAS 2001