38 GHz Antennas on Micromachined Silicon Substrates

Contributo in Atti di convegno
Data di Pubblicazione:
2001
Abstract:
A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 um thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
Antennas; Micromachining; RF MEMS
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/237999
Titolo del libro:
Proceedings of the European Microwave Week 2001, GAAS2001/EuMC2001 Conferences