Publication Date:
2001
abstract:
A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. Sparameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Micromachining; Magnetostatic Waves; Resonators
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the European Microwave Week 2001, GAAS2001/EuMC2001 Conferences