Deposition of SiOx Films from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics

Academic Article
Publication Date:
2002
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/84393
Published in:
PLASMAS AND POLYMERS
Journal