Publication Date:
1992
abstract:
The growth by rf diode sputtering of magnetic garnet thin single and multiple layers and their morphological, compositional and optical absorption characterization are described. Crystalline, defect-free layers and multilayer structures can be obtained by properly imposing the sputtering conditions (substrate temperature and rf power) and the thermal post-annealing cycle to crystallize ex-situ the garnet films.
Iris type:
01.01 Articolo in rivista
Keywords:
Films - Crystalline; Films - Growing; Films - Morphology; Films - Optical Properties; Garnets - Magnetic Properties
List of contributors:
DE GASPERIS, Paolo; Marcelli, Romolo
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