Low power, MEMS liquid flow sensor with silicone coating electrical insulation

Conference Paper
Publication Date:
2014
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/226998
Book title:
Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014)