High-order harmonic generation in a microfluidic glass device

We report on the efficient generation of high-order harmonics in helium gas inside complex glass micro-devices fabricated by femtosecond laser micromachining. By exploiting the three-dimensional capabilities and extreme flexibility of this fabrication technique we developed fluidic micro-structures in a fused-silica substrate that allowed us to achieve accurate control of the gas density inside a micrometer-sized microchannel. As a result, we achieved a broadband spectrum of extreme ultraviolet (XUV) radiation which extends up to 200 eV and we observed a considerable increase in the harmonics generation efficiency if compared with traditional harmonic generation in gas jets. We foresee that the application of femosecond-laser-micromachined glass devices to high-order harmonics generation can be extended to more complex on-chip systems including different functionalities, thus opening the possibility to future miniaturization of XUV and Attosecond beamlines.