A study of the mechanical vibrations of a table-top extreme ultraviolet interference nanolithography tool

Academic Article

Publication Date:

2010

abstract:

[object Object]

Iris type:

01.01 Articolo in rivista

List of contributors:

Zuppella, Paola

Authors of the University:

ZUPPELLA PAOLA

Handle:

https://iris.cnr.it/handle/20.500.14243/288518

Published in:

REVIEW OF SCIENTIFIC INSTRUMENTS

Journal

Overview

URL

http://www.scopus.com/record/display.url?eid=2-s2.0-77952406654&origin=inward