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Reliability of RF-MEMS Series Switches under Low and Medium Power Cycling

Conference Paper
Publication Date:
2004
abstract:
Abstract--Single Pole Single Through (SPST) series micromachined switches have been characterized to check their reliability under low (3 dBm) and medium (23 dBm) power cycling. Negligible changes of the electrical performances have been recorded in low power regime, while failure or decrease of the elctrical response is obtained for the medium power test around 10^5 cycles. Continuous medium power injection does not result in any failure for the optimized switch configuration
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF-MEMS; Switches; Reliability; Power Handling
List of contributors:
Catoni, Simone; Minucci, Gianluca; Marcelli, Romolo
Handle:
https://iris.cnr.it/handle/20.500.14243/206526
Book title:
Proceedings of the 5th Workshop on MEMS for Millimeter Wave Communications, MEMSWAVE 2004
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