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Circuital Modeling of Coplanar Series RF-MEMS Switches

Conference Paper
Publication Date:
2004
abstract:
Abstract--Micromachined coplanar RF-MEMS switches in series configuration have been realized and tested. A circuital approach based on an analytical approach has been used to obtain a lumped equivalent circuit to model the ON and OFF states up to 20 GHz.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Circuital Modeling
List of contributors:
Bartolucci, Giancarlo; Minucci, Gianluca; Marcelli, Romolo
Handle:
https://iris.cnr.it/handle/20.500.14243/206524
Book title:
Proceedings of the 5th Workshop on MEMS for Millimeter Wave Communications, MEMSWAVE 2004
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