Modeling of a MEMS Single-Switch Phase Shifter by Using CAD (COMPUTER AIDED DESIGN) Software

Microwave and millimeter-wave phase shifters are essential components in phased-array antennas for telecommunications and radar applications. Most of the microelectromechanical systems (MEMS) phase shifters developed today are based on established designs except that the solid-state switch is replaced by a MEMS switch. MEMS switches result in lower loss phase shifters at any frequency, especially from 8-120 GHz and result in a wideband performance when compared to similar designs using solid-state devices. The goal of the research activity was to design a Single-switch Phase Shifter by using MEMS switching devices, starting from original and unconventional semiconductor-based designs. Theoretical results are encouraging and show that the proposed phase shifter can be fabricated.