On-wafer method for experimental characterization of MEMS matrix, using a two-port Vector Network Analyzer

Abstract -- The paper presents an experimental method useful to characterize a multiport circuit, in particular a MEMS (M icro-Electro-Mechanical System) matrix, using a two-port VNA (V ector Network Analyzer). As example, the method is applied for a four-port circuit (a coupler). The results obtained by using this method and the expected results obtained by simulation are in good agreement.