Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects
Contributo in Atti di convegno
Data di Pubblicazione:
2009
Abstract:
Abstract -- MIM capacitors made by the same structures
and materials commonly used for the actuation of RF
MEMS switches have been systematically investigated, to
get information about the charging effects induced by the
actuation pads.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Charging; MIM Capacitors; Actuation
Elenco autori:
DE ANGELIS, Giorgio; Bartolucci, Giancarlo; Lucibello, Andrea; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009