Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects
Conference Paper
Publication Date:
2009
abstract:
Abstract -- MIM capacitors made by the same structures
and materials commonly used for the actuation of RF
MEMS switches have been systematically investigated, to
get information about the charging effects induced by the
actuation pads.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Charging; MIM Capacitors; Actuation
List of contributors:
DE ANGELIS, Giorgio; Bartolucci, Giancarlo; Lucibello, Andrea; Marcelli, Romolo
Book title:
Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009