Dislocation density and structure in Si1-xGex buffer layers deposited by LEPECVD

Conference Paper
Publication Date:
2003
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/185883
Book title:
Microscopy of semiconducting materials 2003
Published in:
INSTITUTE OF PHYSICS CONFERENCE SERIES
Series