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Atomic layer deposition of zirc oxide
Conference Poster
Publication Date:
2009
Iris type:
04.03 Poster in Atti di convegno
Keywords:
ZnO; ALD
List of contributors:
Bolzan, Marco; Sartori, Andrea; Zanella, Pierino; Visentin, Francesca; Natali, MARCO STEFANO; Rossetto, GILBERTO LUCIO
Authors of the University:
NATALI MARCO STEFANO
VISENTIN FRANCESCA
Handle:
https://iris.cnr.it/handle/20.500.14243/61866
