New Hafnium compounds for MOCVD of HfO2 thin films

Conference Poster

Publication Date:

2005

Iris type:

04.03 Poster in Atti di convegno

Keywords:

MOCVD; HfO2; thin films

List of contributors:

Bolzan, Marco; Saoncella, Omar; Zanella, Pierino; Carta, Giovanni; Natali, MARCO STEFANO; Crociani, Laura; Rossetto, GILBERTO LUCIO

Authors of the University:

CROCIANI LAURA

NATALI MARCO STEFANO

Handle:

https://iris.cnr.it/handle/20.500.14243/61839