Stability study of a magnesium b-dichetonate as precursor for chemical vapor deposition of MgO

Conference Poster
Publication Date:
2010
Iris type:
04.03 Poster in Atti di convegno
Keywords:
MgO; CVD
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/61823