Evaluation of residual stress in MEMS structures by means of digital holography

Articolo
Data di Pubblicazione:
2003
Abstract:
Morphology of MEMS structures subjected to static deformations and thermal loading are investigated by digital microscope holography
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
digital holography; stress; mems; optoelectronics
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/164667