Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry

We report the design and testing of a small, high vacuum chamber that allows real-time, . in situ spectroscopic ellipsometry (SE) measurements; the chamber was designed to be easily inserted within the arms of a commercial ellipsometer. As a test application, we investigated the temperature-induced solid-state dewetting of thin (20 to 8. nm) Au layers on Si wafers. . In situ SE measurements acquired in real time during the heating of the samples reveal features that can be related to the birth of a localized surface plasmon resonance (LSPR), and demonstrate the presence of a temperature threshold for the solid-state dewetting.